Invention Grant
US07671417B2 Memory cell array, method of producing the same, and semiconductor memory device using the same
有权
存储单元阵列,其制造方法以及使用其的半导体存储器件
- Patent Title: Memory cell array, method of producing the same, and semiconductor memory device using the same
- Patent Title (中): 存储单元阵列,其制造方法以及使用其的半导体存储器件
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Application No.: US11840559Application Date: 2007-08-17
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Publication No.: US07671417B2Publication Date: 2010-03-02
- Inventor: Eiji Yoshida , Tetsu Tanaka , Toshihiko Miyashita
- Applicant: Eiji Yoshida , Tetsu Tanaka , Toshihiko Miyashita
- Applicant Address: JP Yokohama
- Assignee: Fujitsu Microelectronics Limited
- Current Assignee: Fujitsu Microelectronics Limited
- Current Assignee Address: JP Yokohama
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Main IPC: H01L29/72
- IPC: H01L29/72

Abstract:
A memory cell array includes isolated semiconductor regions formed on a supporting insulating substrate, memory cells formed in the respective semiconductor regions, and insulating regions formed so as to insulate the memory cells. Each memory cell formed in a semiconductor region includes a source region, a drain region, a front gate region formed on a gate insulating film formed on one of side surfaces of the semiconductor region such that the source region and the drain region are separated from each other by the front gate region, and a back gate region formed on a gate insulating film formed on an opposite side surface of the semiconductor region such that the source region and the drain region are separated from each other by the back gate region. Each memory cell shares the back gate region with a memory cell adjacent in a row direction.
Public/Granted literature
- US20070278578A1 MEMORY CELL ARRAY, METHOD OF PRODUCING THE SAME, AND SEMICONDUCTOR MEMORY DEVICE USING THE SAME Public/Granted day:2007-12-06
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