Invention Grant
- Patent Title: Air-gap insulated interconnections
- Patent Title (中): 气隙绝缘互连
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Application No.: US11772899Application Date: 2007-07-03
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Publication No.: US07671442B2Publication Date: 2010-03-02
- Inventor: Brent A. Anderson , Andres Bryant , Jeffrey P. Gambino , Anthony K. Stamper
- Applicant: Brent A. Anderson , Andres Bryant , Jeffrey P. Gambino , Anthony K. Stamper
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Richard M. Kotulak
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
Air-gap insulated interconnection structures and methods of fabricating the structures, the methods including: forming a dielectric layer on a substrate; forming a capping layer on a top surface of the dielectric layer; forming a trench through the capping layer, the trench extending toward said substrate and into but not through, the dielectric layer; forming a sacrificial layer on opposing sidewalls of the trench; filling the trench with a electrical conductor; and removing a portion of the sacrificial layer from between the electrical conductor and the dielectric layer to form air-gaps.
Public/Granted literature
- US20070252282A1 AIR-GAP INSULATED INTERCONNECTIONS Public/Granted day:2007-11-01
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