Invention Grant
US07671444B2 Empty vias for electromigration during electronic-fuse re-programming
有权
电子熔丝重新编程期间用于电迁移的空通孔
- Patent Title: Empty vias for electromigration during electronic-fuse re-programming
- Patent Title (中): 电子熔丝重新编程期间用于电迁移的空通孔
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Application No.: US11767580Application Date: 2007-06-25
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Publication No.: US07671444B2Publication Date: 2010-03-02
- Inventor: Ping-Chuan Wang , Wai-Kin Li
- Applicant: Ping-Chuan Wang , Wai-Kin Li
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Yunamin Cai
- Main IPC: H01L23/525
- IPC: H01L23/525 ; H01L23/58 ; H01L29/00

Abstract:
The disclosure relates generally to integrated circuit (IC) chip fabrication, and more particularly, to an e-fuse device including an opening, a first via and a second via in an interlayer dielectric, wherein the opening, the first via and the second via are connected to an interconnect below the interlayer dielectric; a dielectric layer that encloses the first via and the second via; and a metal layer over the dielectric layer, wherein the metal layer fills the opening with a metal, and wherein the first via and the second via are substantially empty to allow for electromigration of the interconnect during re-programming of the e-fuse device.
Public/Granted literature
- US20080315353A1 EMPTY VIAS FOR ELECTROMIGRATION DURING ELECTRONIC-FUSE RE-PROGRAMMING Public/Granted day:2008-12-25
Information query
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