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US07671607B2 System and method for measuring air bearing gap distance 有权
测量空气轴承间隙距离的系统和方法

System and method for measuring air bearing gap distance
Abstract:
A method of determining the air gap distance between an air bearing pad and an apparatus floating on the air bearing pad comprises coupling a first probe to the air bearing pad; coupling a second probe to the apparatus floating on the air bearing pad, wherein the first and second probes provide the capacitance level between the air bearing pad and the apparatus; converting the capacitance level to a frequency; converting the frequency to a voltage level proportional to the air gap distance; and calculating the air gap distance based on the voltage level.
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