Invention Grant
- Patent Title: Sheet-like probe, method of producing the probe, and application of the probe
- Patent Title (中): 片状探针,探针的制造方法和探针的应用
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Application No.: US11587485Application Date: 2005-04-26
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Publication No.: US07671609B2Publication Date: 2010-03-02
- Inventor: Katsumi Sato , Kazuo Inoue , Hitoshi Fujiyama , Mutsuhiko Yoshioka , Hisao Igarashi
- Applicant: Katsumi Sato , Kazuo Inoue , Hitoshi Fujiyama , Mutsuhiko Yoshioka , Hisao Igarashi
- Applicant Address: JP Tokyo
- Assignee: JSR Corporation
- Current Assignee: JSR Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2004-132151 20040427
- International Application: PCT/JP2005/007935 WO 20050426
- International Announcement: WO2005/103730 WO 20051103
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
A sheet-like probe has a porous film. In the sheet-like probe, a contact film is penetratingly supported at each position of through-holes formed in the porous film, and a peripheral edge of the contact film and the porous film are integrated such that a flexible resin insulation layer is included in a fine hole of the porous film. Electrode structure bodies are supported in a penetrating manner in the insulation layer. Each electrode structure body includes a surface electrode section exposed to the front surface of the insulation layer and projecting from the front surface of the insulation layer, a back surface electrode section exposed to the back surface of the insulation layer, a short-circuit section continuously extending from the base end of the front surface electrode section, penetrating the insulation layer in its thickness direction, and connected to the back surface electrode section, a holding section extending outward, along the front surface of the insulation layer, from the base end section of the front surface electrode section, and a supporting body supporting the insulation layer.
Public/Granted literature
- US20070200574A1 Sheet-like probe, method of producing the probe, and application of the probe Public/Granted day:2007-08-30
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