Invention Grant
- Patent Title: MEMS oscillator with temperature sensitive MEMS capacitances
- Patent Title (中): 具有温度敏感的MEMS电容的MEMS振荡器
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Application No.: US12037634Application Date: 2008-02-26
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Publication No.: US07671710B2Publication Date: 2010-03-02
- Inventor: Yoshifumi Yoshida , Fumio Kimura
- Applicant: Yoshifumi Yoshida , Fumio Kimura
- Applicant Address: JP Chiba
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2007-045008 20070226
- Main IPC: H03J1/00
- IPC: H03J1/00 ; H03B5/30
Abstract:
Provided is an oscillator including: a MEMS resonator for mechanically vibrating; an output oscillator circuit for oscillating at a resonance frequency of the MEMS resonator to output an oscillation signal; and a MEMS capacitor for changing a capacitance thereof caused by a change in a distance between an anode electrode and a cathode beam according to an environmental temperature.
Public/Granted literature
- US20080204153A1 OSCILLATOR Public/Granted day:2008-08-28
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