Invention Grant
US07671966B2 Computer architecture for and method of high-resolution imaging using a low-resolution image transducer 失效
使用低分辨率图像传感器的计算机体系结构和高分辨率成像方法

  • Patent Title: Computer architecture for and method of high-resolution imaging using a low-resolution image transducer
  • Patent Title (中): 使用低分辨率图像传感器的计算机体系结构和高分辨率成像方法
  • Application No.: US10970963
    Application Date: 2004-10-22
  • Publication No.: US07671966B2
    Publication Date: 2010-03-02
  • Inventor: David A. Markle
  • Applicant: David A. Markle
  • Applicant Address: US CA San Jose
  • Assignee: Ultratech, Inc.
  • Current Assignee: Ultratech, Inc.
  • Current Assignee Address: US CA San Jose
  • Agent Allston L. Jones
  • Main IPC: G03B27/42
  • IPC: G03B27/42 G02B26/00 A61N5/00
Computer architecture for and method of high-resolution imaging using a low-resolution image transducer
Abstract:
Parallel data bus architecture, lithography system and method for substrate patterning with a high-resolution image by data generation transferring, display or printing high edge placement accuracy images from multiple exposures of plurality of predefined patterns with lower edge placement accuracy. Data bus architecture includes n predetermined patterns in n memory arrays each storing a low resolution pattern to be formed onto microelement array with a data bus connecting memory arrays to an image transducer memory array. Data bus includes switches allowing data transfer from any one memory array to the image transducer array with a memory control unit connected to memory arrays and one or more data bus switches so 2m−1 columns of pattern data stored in the mth memory array are sequentially transferred to 2m−1 memory cell columns of the image transducer memory array, m an integer begging at 1 incremented by 1 to n.
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