Invention Grant
US07671995B2 Method for improving surface plasmon resonance by using conducting metal oxide as adhesive layer 有权
通过使用导电金属氧化物作为粘合剂层来改善表面等离子体共振的方法

Method for improving surface plasmon resonance by using conducting metal oxide as adhesive layer
Abstract:
Surface plasmon resonance (SPR) sensing technique which provides high specificity and accuracy has been an important method for molecular sensing technology. In the past, in order to affix 45 nm gold film onto glass or silicon substrate, several nanometers of chromium (Cr) or titanium (Ti) has been used as adhesive layer for the attachment of Au film. However, the existence of Cr or Ti thin film deteriorates the performance of SPR sensor due to their characteristic optical absorption. Our experimental results have confirmed the uses of conducting metal oxide, specifically, ITO and Zinc Oxide (ZnO) can be used to replace Cr or Ti for better performance in terms of SPR resonant properties (resonant angle and HMBW) and sensitivity enhancement for 3 to 15 times than traditional ones. It would contribute significantly to the SPR applications in both biosensors and gas sensors.
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