Invention Grant
- Patent Title: Separable modulator
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Application No.: US12325964Application Date: 2008-12-01
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Publication No.: US07672035B2Publication Date: 2010-03-02
- Inventor: Jeffrey B. Sampsell , Mark W. Miles , Clarence Chui , Manish Kothari
- Applicant: Jeffrey B. Sampsell , Mark W. Miles , Clarence Chui , Manish Kothari
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: G02B26/00
- IPC: G02B26/00
Abstract:
A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.
Public/Granted literature
- US20090080060A1 SEPARABLE MODULATOR Public/Granted day:2009-03-26
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