Invention Grant
US07672043B2 Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth
有权
反射折射成像系统表现出增强的深紫外光谱带宽
- Patent Title: Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth
- Patent Title (中): 反射折射成像系统表现出增强的深紫外光谱带宽
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Application No.: US10903494Application Date: 2004-07-29
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Publication No.: US07672043B2Publication Date: 2010-03-02
- Inventor: J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
- Applicant: J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Technologies Corporation
- Current Assignee: KLA-Tencor Technologies Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Smyrski Law Group. A P.C.
- Main IPC: G02B5/08
- IPC: G02B5/08

Abstract:
A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective includes a lens group having at least one focusing lens configured to receive light energy and form an intermediate image, at least one field lens oriented to receive the intermediate image and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy and apply light energy to the specimen. The objective may provide, in certain instances, a spectral bandwidth up to approximately 193 to 266 nanometers and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The field lens may include more than one lens and may be formed of a material different from at least one other lens in the objective.
Public/Granted literature
- US20050259318A1 Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth Public/Granted day:2005-11-24
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