Invention Grant
- Patent Title: Lens made of a crystalline material
- Patent Title (中): 透镜由结晶材料制成
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Application No.: US11864193Application Date: 2007-09-28
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Publication No.: US07672044B2Publication Date: 2010-03-02
- Inventor: Birgit Enkisch , Hartmut Enkisch , Toralf Gruner
- Applicant: Birgit Enkisch , Hartmut Enkisch , Toralf Gruner
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G02B13/14
- IPC: G02B13/14

Abstract:
As a preliminary stage in manufacturing a lens or lens part for an objective, in particular a projection objective for a microlithography projection system, an optical blank is made from a crystal material. As a first step in manufacturing the optical blank, one determines the orientation of a first crystallographic direction that is defined in the crystallographic structure of the material. The material is then machined into an optical blank so that the first crystallographic direction is substantially perpendicular to an optical blank surface of the optical blank. Subsequently, a marking is applied to the optical blank or to a mounting element of the optical blank. The marking has a defined relationship to a second crystallographic direction which is oriented at a non-zero angle relative to the first crystallographic direction.
Public/Granted literature
- US20080019013A1 Lens Made of a Crystalline Material Public/Granted day:2008-01-24
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