Invention Grant
- Patent Title: Recipe-and-component control module and methods thereof
- Patent Title (中): 配方和组件控制模块及其方法
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Application No.: US11693664Application Date: 2007-03-29
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Publication No.: US07672747B2Publication Date: 2010-03-02
- Inventor: Chung-Ho Huang , Andrew Lui
- Applicant: Chung-Ho Huang , Andrew Lui
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: IP Strategy Group, P.C.
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G06F15/173
Abstract:
A recipe-and component control module (RACCM) is provided. The RACCM is a server for performing data management in a plasma processing system with a plurality of components. The RACCM includes a plurality of intelligent agents. Each intelligent agent of the intelligent agents is configured to interact with each component of the plurality of components. The RACCM also includes a coordinating agent, which is configured to receive processed data from the plurality of intelligent agents.
Public/Granted literature
- US20080243988A1 RECIPE-AND-COMPONENT CONTROL MODULE AND METHODS THEREOF Public/Granted day:2008-10-02
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