Invention Grant
- Patent Title: Laminated structure method
- Patent Title (中): 层压结构法
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Application No.: US11562253Application Date: 2006-11-21
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Publication No.: US07673385B2Publication Date: 2010-03-09
- Inventor: Tetsu Miyoshi
- Applicant: Tetsu Miyoshi
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2003-308880 20030901
- Main IPC: H05K3/30
- IPC: H05K3/30 ; H01L21/4763

Abstract:
A laminated structure having an electrode hard to peel off and a method of manufacturing the laminated structure. The laminated structure has: a backing substrate; a lower electrode including an adhesive layer containing a metal oxide and a conductive layer formed on the backing substrate with the adhesive layer therebetween; a dielectric layer disposed on the lower electrode; and an upper electrode disposed on the dielectric layer. Further, the method includes the steps of: (a) disposing a lower electrode by forming a conductive layer on a backing substrate with an adhesive layer containing a metal oxide therebetween; (b) disposing a dielectric layer by spraying powder of a dielectric material to the lower electrode for deposition; (c) heat-treating the dielectric layer; and (d) forming an upper electrode on the dielectric layer before or after step (c).
Public/Granted literature
- US20070093051A1 LAMINATED STRUCTURE, PIEZOELECTRIC ACTUATOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2007-04-26
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