Invention Grant
- Patent Title: Acceleration sensor having single and multi-layer substrates
- Patent Title (中): 具有单层和多层基板的加速度传感器
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Application No.: US12000626Application Date: 2007-12-14
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Publication No.: US07673514B2Publication Date: 2010-03-09
- Inventor: Teruya Fukaura , Shinichiro Katsuki , Yutaka Katahara , Seishi Shibata
- Applicant: Teruya Fukaura , Shinichiro Katsuki , Yutaka Katahara , Seishi Shibata
- Applicant Address: JP Chiyoda-Ku, Tokyo
- Assignee: Mitsubishi Denki Kabushiki Kaisha
- Current Assignee: Mitsubishi Denki Kabushiki Kaisha
- Current Assignee Address: JP Chiyoda-Ku, Tokyo
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JP2005-038637 20050216
- Main IPC: G01P15/125
- IPC: G01P15/125
Abstract:
An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provided with an electrode drawing opening. Further, the multilayer second substrate consists of a plurality of layers. The sensor portion (a movable mass body and a fixed electrode) is provided in a sealed cavity portion which is formed between the first substrate and the multilayer second substrate which are opposed to each other.
Public/Granted literature
- US20080105053A1 Acceleration sensor Public/Granted day:2008-05-08
Information query
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