A method and system of a capacitive sensor based structure and method with tilt compensation capability is disclosed. In one embodiment, a sensor includes, a series of nested cantilever beams (e.g., may face each other in alternating form such that each subsequent cantilever beam is inside and oppositely facing a respective outer cantilever beam) in an upper surface of a tilt correction assembly, a spacer coupled to a contact zone of a lower surface of the tilt correction assembly, and a first conductive surface and a second conductive surface substantially parallel to the first conductive surface, wherein the spacer to cause at least one of the first conductive surface and the second conductive surface to deflect when a force is applied to a force measuring assembly above the sensor.