Invention Grant
- Patent Title: Transparent electroconductive film and process for producing same
- Patent Title (中): 透明导电膜及其制造方法
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Application No.: US10876525Application Date: 2004-06-28
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Publication No.: US07674357B2Publication Date: 2010-03-09
- Inventor: Takeshi Hattori , Kunio Saegusa , Yuzo Shigesato
- Applicant: Takeshi Hattori , Kunio Saegusa , Yuzo Shigesato
- Applicant Address: JP Osaka
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Osaka
- Agency: Sughrue Mion, PLLC
- Priority: JP2001-089621 20010327; JP2001-328894 20011026
- Main IPC: C23C14/34
- IPC: C23C14/34

Abstract:
There are provided: (1) a process for producing an InSbO4-containing transparent electroconductive film, which comprises the step of sputtering simultaneously: (i) a target (A) for sputtering, which comprises In, Sb and O, and whose atomic ratio of Sb/In is from 0.9 to 1.1, and (ii) a target (B) for sputtering, which comprises Sb, (2) a transparent eletroconductive film, which contains In, Sb and O, and whose atomic ratio of Sb/In is from 0.8 to 1.5, and (3) a target for sputtering, which contains In, Sb and O, and whose atomic ratio of Sb/In is from 1.2 to 2.0.
Public/Granted literature
- US20040238346A1 Transparent electroconductive film and process for poducing same Public/Granted day:2004-12-02
Information query
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