Invention Grant
- Patent Title: Manufacturing method of optical semiconductor device
- Patent Title (中): 光学半导体器件的制造方法
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Application No.: US11700215Application Date: 2007-01-31
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Publication No.: US07674391B2Publication Date: 2010-03-09
- Inventor: Hiroshi Hamada , Kazunori Saitoh
- Applicant: Hiroshi Hamada , Kazunori Saitoh
- Applicant Address: JP Kanagawa
- Assignee: Opnext Japan, Inc.
- Current Assignee: Opnext Japan, Inc.
- Current Assignee Address: JP Kanagawa
- Agency: Stites & Harbison, PLLC
- Agent Juan Carlos A. Marquez, Esq.
- Priority: JP2006-158294 20060607
- Main IPC: B29D11/00
- IPC: B29D11/00

Abstract:
It is an objective to control the occurrence of the disorder of a far-field pattern and of an optical axial shift. A manufacturing method of a semiconductor laser device has the step for preparing a semiconductor substrate which has growth of a multi-layer including an active layer, the step for forming a mask over the growth of a multi-layer, and a step for forming a stripe-shaped ridge by dry etching and wet etching. A structure stacking a p-type AlGaInP layer, an etch-stop layer, a p-type Alx=0.7GaInP layer, a p-type Alx=0.6GaInP layer, a p-type GaAs layer, in order, over the active layer is taken in order to make the tailing part created in the dry etching process smaller by wet etching. The tailing part is composed of a p-type Alx=0.7GaInP layer including a high mixed crystal ratio of aluminum. Therefore, the p-type Alx=0.7GaInP layer is etched faster than the p-type Alx=0.6GaInP layer during wet etching, so that the tailing part becomes smaller, the far-field pattern of the semiconductor laser device is not disordered, and the optical axis shift does not occur.
Public/Granted literature
- US20070284336A1 Manufacturing method of optical semiconductor device Public/Granted day:2007-12-13
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