Invention Grant
- Patent Title: Memory device and method of manufacturing the same
- Patent Title (中): 存储器件及其制造方法
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Application No.: US11710488Application Date: 2007-02-26
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Publication No.: US07674661B2Publication Date: 2010-03-09
- Inventor: Young-Joon Ahn , Suk-Pil Kim , Jong-Jin Lee
- Applicant: Young-Joon Ahn , Suk-Pil Kim , Jong-Jin Lee
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2006-0090585 20060919
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
In a memory device and a method of manufacturing the memory device, a pair of channel layers included in the memory device may be formed on a sidewall of the sacrificial single crystalline layer pattern located on a protrusion of a semiconductor substrate. Accordingly, an etch damage may be reduced at the channel layer. The sacrificial single crystalline layer pattern may be removed to generate a void between the pair of the channel layers. As a result, a generation of a coupling effect may be reduced between the channel layers.
Public/Granted literature
- US20080067580A1 Memory device and method of manufacturing the same Public/Granted day:2008-03-20
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