Invention Grant
- Patent Title: CMOS structure including topographic active region
- Patent Title (中): CMOS结构包括地形活动区域
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Application No.: US11562093Application Date: 2006-11-21
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Publication No.: US07674667B2Publication Date: 2010-03-09
- Inventor: Huilong Zhu
- Applicant: Huilong Zhu
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Ian D. MacKinnon, Esq.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A CMOS structure includes a first device located using a first active region within a semiconductor substrate, where the first active region is planar and has a first crystallographic orientation. The CMOS structure also includes a second device that is located using a second active region within the semiconductor substrate, where the second active region is topographic and has a second crystallographic orientation absent the first crystallographic orientation. The first crystallographic orientation and the second crystallographic orientation allow for performance optimizations of the first device and the second device, typically with respect to charge carrier mobility. The topographic second active region may also have a single thickness. The CMOS structure may be fabricated using a crystallographically specific etchant for forming the topographic second active region.
Public/Granted literature
- US20080116522A1 CMOS STRUCTURE INCLUDING TOPOGRAPHIC ACTIVE REGION Public/Granted day:2008-05-22
Information query
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