Invention Grant
- Patent Title: Method for producing a transistor component having a field plate
- Patent Title (中): 具有场板的晶体管部件的制造方法
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Application No.: US12115168Application Date: 2008-05-05
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Publication No.: US07674678B2Publication Date: 2010-03-09
- Inventor: Uli Hiller , Oliver Blank
- Applicant: Uli Hiller , Oliver Blank
- Applicant Address: AT Villach
- Assignee: Infineon Technologies Austria AG
- Current Assignee: Infineon Technologies Austria AG
- Current Assignee Address: AT Villach
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for producing a transistor component having a field plate. One embodiment includes providing a semiconductor body having a first side, and including a first trench extending into the semiconductor body. A field plate dielectric layer is produced on the first side and at uncovered areas of the first trench such that a residual trench remains. A field plate layer is produced in the residual trench. The first side of the semiconductor body is uncovered using a polishing method. The field plate dielectric layer is partially removed from the at least one first trench proceeding from the first side.
Public/Granted literature
- US20090273024A1 METHOD FOR PRODUCING A TRANSISTOR COMPONENT HAVING A FIELD PLATE Public/Granted day:2009-11-05
Information query
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