Invention Grant
- Patent Title: Adjuvant for chemical mechanical polishing slurry
- Patent Title (中): 化学机械抛光浆辅料
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Application No.: US11319071Application Date: 2005-12-28
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Publication No.: US07674716B2Publication Date: 2010-03-09
- Inventor: Gi Ra Yi , Jong Pil Kim , Jung Hee Lee , Jeong Jin Hong , Young Jun Hong , No Ma Kim , An Na Lee
- Applicant: Gi Ra Yi , Jong Pil Kim , Jung Hee Lee , Jeong Jin Hong , Young Jun Hong , No Ma Kim , An Na Lee
- Applicant Address: KR Seoul
- Assignee: LG Chem. Ltd.
- Current Assignee: LG Chem. Ltd.
- Current Assignee Address: KR Seoul
- Agency: McKenna Long&Aldridge LLP
- Priority: KR10-2004-0114824 20041229; KR10-2005-0113758 20051125
- Main IPC: H01L21/302
- IPC: H01L21/302

Abstract:
Disclosed is an adjuvant for use in simultaneous polishing of a cationically charged material and an anionically charged material, which forms a adsorption layer on the cationically charged material in order to increase the polishing selectivity of the anionically charged material to cationically charged material, wherein the adjuvant comprises a polyelectrolyte salt containing: (a) a graft type polyelectrolyte that has a weight average molecular weight of 1,000˜20,000 and comprises a backbone and a side chain; and (b) a basic material. CMP (chemical mechanical polishing) slurry comprising the above adjuvant and abrasive particles is also disclosed.
Public/Granted literature
- US20060141741A1 Adjuvant for chemical mechanical polishing slurry Public/Granted day:2006-06-29
Information query
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