Invention Grant
- Patent Title: Formulation for removal of photoresist, etch residue and BARC
- Patent Title (中): 去除光致抗蚀剂,蚀刻残渣和BARC的配方
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Application No.: US11602662Application Date: 2006-11-21
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Publication No.: US07674755B2Publication Date: 2010-03-09
- Inventor: Matthew I. Egbe , Michael Walter Legenza
- Applicant: Matthew I. Egbe , Michael Walter Legenza
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Lina Yang
- Main IPC: C11D7/50
- IPC: C11D7/50

Abstract:
A formulation for removing photoresist, ion implanted photoresist, etch residue or BARC comprises: an ammonium hydroxide and a 2-aminobenzothiazole, remainder water. Preferably the formulation comprises: tetramethyl ammonium hydroxide, tolyltriazole, propylene glycol, 2-aminobenzothiazole, dipropylene glycol monomethyl ether, remainder water; more preferably: tetramethyl ammonium hydroxide 1-15 wt %, tolyltriazole 1-5 wt %, propylene glycol 5-15 wt %, 2-aminobenzothiazole 1-10 wt %; dipropylene glycol monomethyl ether 20-45 wt %, remainder water. The invention is also a method of removing materials selected from the group consisting of photoresist, etch residue, BARC and combinations thereof, from a substrate comprising: applying a formulation, described above, to the substrate to remove the material from the substrate.
Public/Granted literature
- US20070149430A1 Formulation for removal of photoresist, etch residue and BARC Public/Granted day:2007-06-28
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