Invention Grant
- Patent Title: Semiconductor wafer and method of fabricating the same
- Patent Title (中): 半导体晶片及其制造方法
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Application No.: US11463137Application Date: 2006-08-08
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Publication No.: US07675091B2Publication Date: 2010-03-09
- Inventor: Young-Soo Park , Kyoo-Chul Cho , Shin-Hyeok Han , Tae-Soo Kang
- Applicant: Young-Soo Park , Kyoo-Chul Cho , Shin-Hyeok Han , Tae-Soo Kang
- Applicant Address: KR Gyeonggi-Do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2005-0072928 20050809
- Main IPC: H01L29/80
- IPC: H01L29/80

Abstract:
Disclosed is a semiconductor wafer and method of fabricating the same. The semiconductor wafer is comprised of a semiconductor layer formed on an insulation layer on a base substrate. The semiconductor layer includes a surface region organized in a first crystallographic orientation, and another surface region organized in a second crystallographic orientation. The performance of a semiconductor device with unit elements that use charges, which are activated in high mobility to the crystallographic orientation, as carriers is enhanced. The semiconductor wafer is completed by forming the semiconductor layer with the second crystallographic orientation on the plane of the first crystallographic orientation, growing an epitaxial layer, forming the insulation layer on the epitaxial layer, and then bonding the insulation layer to the base substrate.
Public/Granted literature
- US20070034950A1 SEMICONDUCTOR WAFER AND METHOD OF FABRICATING THE SAME Public/Granted day:2007-02-15
Information query
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