Invention Grant
US07675111B2 Semiconductor device including diffusion layer formed in drift region disposed apart from base region
有权
半导体器件包括在与基极区域分离的漂移区域中形成的扩散层
- Patent Title: Semiconductor device including diffusion layer formed in drift region disposed apart from base region
- Patent Title (中): 半导体器件包括在与基极区域分离的漂移区域中形成的扩散层
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Application No.: US11455173Application Date: 2006-06-19
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Publication No.: US07675111B2Publication Date: 2010-03-09
- Inventor: Takao Arai
- Applicant: Takao Arai
- Applicant Address: JP Kawasaki, Kanagawa
- Assignee: NEC Electronics Corporation
- Current Assignee: NEC Electronics Corporation
- Current Assignee Address: JP Kawasaki, Kanagawa
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2005-185698 20050624
- Main IPC: H01L29/94
- IPC: H01L29/94

Abstract:
Aiming at providing a semiconductor device capable of reducing the ON-resistance when voltage smaller than a predetermined value is applied to the base region and the drift region, and capable of increasing the ON-resistance so as to prevent thermal fracture when the voltage is not smaller than the predetermined value, and at providing a method of fabricating such semiconductor device, a P-type diffusion layer 7 is formed in an N-type drift region 2 of a semiconductor device 100, as being apart from a base region 5, wherein the diffusion layer 7 is formed in a region partitioned by lines L each extending from each of the intersections of the boundary B, between the drift region 2 and a base area 5A of the base region 5, and the side faces of a trench 15 surrounding the base area 5A of the base region 5, towards the bottom plane of the drift region 2 right under the base area 5A, while keeping an angle θ2 of 50° between the lines L and the boundary B.
Public/Granted literature
- US20060289930A1 Semiconductor device and method of fabricating the same Public/Granted day:2006-12-28
Information query
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