Invention Grant
- Patent Title: Forming copper interconnects with Sn coatings
- Patent Title (中): 与Sn涂层形成铜互连
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Application No.: US11074456Application Date: 2005-03-07
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Publication No.: US07675177B1Publication Date: 2010-03-09
- Inventor: Hongqiang Lu , Byung-Sung Kwak , Wilbur G. Catabay
- Applicant: Hongqiang Lu , Byung-Sung Kwak , Wilbur G. Catabay
- Applicant Address: US CA Milpitas
- Assignee: LSI Corporation
- Current Assignee: LSI Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Bever Law Group LLP
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
A copper interconnect with a Sn coating is formed in a damascene structure by forming a trench in a dielectric layer. The trench is formed by electroplating copper simultaneously with a metal dopant to form a doped copper layer. The top level of the doped copper layer is reduced to form a planarized surface level with the surface of the first dielectric layer. The doped copper is annealed to drive the metal dopants to form a metal dopant capping coating at the planarized top surface of the doped copper layer.
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