Invention Grant
- Patent Title: Magnetoresistive sensor device
- Patent Title (中): 磁阻传感器装置
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Application No.: US11778336Application Date: 2007-07-16
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Publication No.: US07675286B2Publication Date: 2010-03-09
- Inventor: Shinichi Hosomi , Hirobumi Matsui , Yuichi Sakai
- Applicant: Shinichi Hosomi , Hirobumi Matsui , Yuichi Sakai
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2007-060011 20070309
- Main IPC: G01R33/02
- IPC: G01R33/02 ; G01R33/06

Abstract:
According to the present invention, a magnetoresistive sensor device, which can be manufactured at a high yield and a low cost, is excellent in magnetoresistance characteristics and is reliable can be provided. The magnetoresistive sensor device comprises a substrate, a signal processing circuit formed on the substrate, a flattening film for flattening the signal processing circuit, a silicon nitride film formed on the flattened signal processing circuit, and magnetoresistive sensor elements formed on the silicone nitride film, in which the flattening film is preferably a spin-on-glass (SOG) film.
Public/Granted literature
- US20080218163A1 MAGNETORESISTIVE SENSOR DEVICE Public/Granted day:2008-09-11
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