Invention Grant
- Patent Title: Lithographic apparatus and device manufacturing method
- Patent Title (中): 平版印刷设备和器件制造方法
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Application No.: US11486379Application Date: 2006-07-14
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Publication No.: US07675607B2Publication Date: 2010-03-09
- Inventor: Andre Bernardus Jeunink , Marcel Koenraad Marie Baggen , Dirk-Jan Bijvoet , Thomas Josephus Maria Castenmiller
- Applicant: Andre Bernardus Jeunink , Marcel Koenraad Marie Baggen , Dirk-Jan Bijvoet , Thomas Josephus Maria Castenmiller
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03B27/62
- IPC: G03B27/62 ; G03B27/58

Abstract:
A lithographic apparatus is disclosed having a support constructed to support a patterning device, the patterning device being capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam, the support including a support clamp constructed to clamp the patterning device to the support, and a bending mechanism constructed to apply a bending torque to the clamped patterning device, the bending mechanism comprising a force/torque actuator configured to act on the clamped patterning device without substantially reducing the clamping force exerted on the patterning device by the support clamp.
Public/Granted literature
- US20080013068A1 Lithographic apparatus and device manufacturing method Public/Granted day:2008-01-17
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