Invention Grant
- Patent Title: Apparatus for producing a hologram mask
- Patent Title (中): 用于制造全息掩模的装置
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Application No.: US11258333Application Date: 2005-10-24
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Publication No.: US07675663B2Publication Date: 2010-03-09
- Inventor: Yukio Taniguchi
- Applicant: Yukio Taniguchi
- Applicant Address: JP Yokohama-Shi, Kanagawa-ken
- Assignee: Kabushiki Kaisha Ekisho Sentan Gijutsu Kaihatsu Center
- Current Assignee: Kabushiki Kaisha Ekisho Sentan Gijutsu Kaihatsu Center
- Current Assignee Address: JP Yokohama-Shi, Kanagawa-ken
- Agency: Graybeal Jackson LLP
- Agent Kevin D. Jablonski
- Priority: JP2001-397021 20011227
- Main IPC: G03H1/12
- IPC: G03H1/12

Abstract:
An apparatus for producing a hologram mask. The apparatus includes a first object light at least partially transmittable through a first original mask having a light transmitting screening pattern, and a first reference light having a first phase difference between it and the first object light. The first object and reference lights cause interference patterns to be recorded a hologram recording material, as do a second object light at least partially transmittable through a second original mask having a light transmitting screening pattern, and a second reference light having a second phase difference between it and the second object light where the second phase difference is not the same as the first phase difference. The resulting first and second original mask images recorded in the hologram recording material can be simultaneously replayed to produce an exposed pattern approximating an exposed pattern of a non-holographic phase shifting photomask.
Public/Granted literature
- US20060040186A1 Apparatus for producing a hologram mask Public/Granted day:2006-02-23
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