Invention Grant
US07677180B2 Apparatus and method for steering transport vehicles in semiconductor processing
失效
用于在半导体加工中转向运输车辆的装置和方法
- Patent Title: Apparatus and method for steering transport vehicles in semiconductor processing
- Patent Title (中): 用于在半导体加工中转向运输车辆的装置和方法
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Application No.: US11160111Application Date: 2005-06-09
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Publication No.: US07677180B2Publication Date: 2010-03-16
- Inventor: Philip L. Campbell , Uldis A. Ziemins
- Applicant: Philip L. Campbell , Uldis A. Ziemins
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: DeLio & Peterson, LLC
- Agent Robert Curcio
- Main IPC: B60L13/04
- IPC: B60L13/04

Abstract:
A steering apparatus and method is implemented that allows high speed, clean, particle-free transport of a semiconductor wafer or lithographic reticle on a transport vehicle at various positions on the vehicle track, especially when entering and exiting turns. Three computer-controlled electro-magnets are mounted at the left, center, and right side of a front steering truck, and are energized to attract strategically placed permanent magnet material mounted on a side of the track where the vehicle enters or exits a turn. The transport vehicle can be levitated by an air cushion or travel on wheels, and controlled by electromotive or electromagnetic forces about the track. Using the steering electro-magnets as a LVDT, a computer processor monitors the location of the transport vehicle about the track.
Public/Granted literature
- US20060278120A1 APPARATUS AND METHOD FOR STEERING TRANSPORT VEHICLES IN SEMICONDUCTOR PROCESSING Public/Granted day:2006-12-14
Information query
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