Invention Grant
- Patent Title: Wafer container and door with vibration dampening latching mechanism
- Patent Title (中): 晶圆容器和门具有减震锁定机构
-
Application No.: US11651779Application Date: 2007-01-10
-
Publication No.: US07677393B2Publication Date: 2010-03-16
- Inventor: John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
- Applicant: John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Patterson, Thuente, Skaar & Christensen, P.A.
- Main IPC: B65D85/30
- IPC: B65D85/30

Abstract:
A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.
Public/Granted literature
- US20070108095A1 Wafer container and door with vibration dampening latching mechanism Public/Granted day:2007-05-17
Information query
IPC分类: