Invention Grant
- Patent Title: Wafer shipping container
- Patent Title (中): 晶圆运输集装箱
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Application No.: US10339150Application Date: 2003-01-09
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Publication No.: US07677394B2Publication Date: 2010-03-16
- Inventor: Patrick Rooney Conarro
- Applicant: Patrick Rooney Conarro
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Richard Pickreign, Esq.
- Main IPC: B65D85/00
- IPC: B65D85/00
Abstract:
A wafer shipping container has a first housing subcontainer. A second housing subcontainer mates with the first housing subcontainer to form a housing. The first housing subcontainer is substantially the same as the second housing subcontainer. A process carrier fits inside the housing.
Public/Granted literature
- US20040134828A1 Wafer shipping container Public/Granted day:2004-07-15
Information query
IPC分类:
