Invention Grant
US07677707B2 Method of forming thick layer by screen printing and method of forming piezoelectric actuator of inkjet head 失效
通过丝网印刷形成厚层的方法和形成喷墨头的压电致动器的方法

Method of forming thick layer by screen printing and method of forming piezoelectric actuator of inkjet head
Abstract:
A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.
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