Invention Grant
- Patent Title: Seeded growth process for preparing aluminum nitride single crystals
- Patent Title (中): 用于制备氮化铝单晶的种子生长工艺
-
Application No.: US11399713Application Date: 2006-04-06
-
Publication No.: US07678195B2Publication Date: 2010-03-16
- Inventor: Raoul Schlesser , Vladimir Noveski , Zlatko Sitar
- Applicant: Raoul Schlesser , Vladimir Noveski , Zlatko Sitar
- Applicant Address: US NC Raleigh
- Assignee: North Carolina State University
- Current Assignee: North Carolina State University
- Current Assignee Address: US NC Raleigh
- Agency: Alston & Bird LLP
- Main IPC: C30B23/00
- IPC: C30B23/00

Abstract:
A method of growing bulk single crystals of an AlN on a single crystal seed is provided, wherein an AlN source material is placed within a crucible chamber in spacial relationship to a seed fused to the cap of the crucible. The crucible is heated in a manner sufficient to establish a temperature gradient between the source material and the seed with the seed at a higher temperature than the source material such that the outer layer of the seed is evaporated, thereby cleaning the seed of contaminants and removing any damage to the seed incurred during seed preparation. Thereafter, the temperature gradient between the source material and the seed is inverted so that the source material is sublimed and deposited on the seed, thereby growing a bulk single crystal of AlN.
Public/Granted literature
- US20070257333A1 Seeded growth process for preparing aluminum nitride single crystals Public/Granted day:2007-11-08
Information query