Invention Grant
- Patent Title: Metrology structure and methods
- Patent Title (中): 计量结构与方法
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Application No.: US12045515Application Date: 2008-03-11
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Publication No.: US07678289B2Publication Date: 2010-03-16
- Inventor: Stephen Jalrus Potochnik , Kenneth James Faase
- Applicant: Stephen Jalrus Potochnik , Kenneth James Faase
- Applicant Address: US TX Houston
- Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee Address: US TX Houston
- Main IPC: G01L21/30
- IPC: G01L21/30 ; B44C1/22
Abstract:
A method of indicating the progress of a sacrificial material removal process, the method, comprising; freeing a portion of a member, the member being disposed in a cage and laterally surrounded by the sacrificial material; and preventing the freed portion of the member from floating away by retaining the freed member.
Public/Granted literature
- US20080157078A1 Metrology Structure And Methods Public/Granted day:2008-07-03
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