Invention Grant
US07678527B2 Methods and compositions for providing photoresist with improved properties for contacting liquids
失效
用于提供具有改进的液体接触性能的光刻胶的方法和组合物
- Patent Title: Methods and compositions for providing photoresist with improved properties for contacting liquids
- Patent Title (中): 用于提供具有改进的液体接触性能的光刻胶的方法和组合物
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Application No.: US10688109Application Date: 2003-10-16
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Publication No.: US07678527B2Publication Date: 2010-03-16
- Inventor: Robert P Meagley , Ernisse S Putna , Wang Yueh
- Applicant: Robert P Meagley , Ernisse S Putna , Wang Yueh
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; G03F7/20

Abstract:
Embodiments of the invention provide methods and compositions for providing photoresists with improved liquid-contact properties. For one embodiment of the invention, a photoresist is provided having one or more constituent components that are resistant to diffusion between the photoresist and an index-matching liquid (IML). For such an embodiment in which the IML is water, a photoresist component is provided that is hydrophobic thus reducing diffusion between the photoresist and the water. In various alternative embodiments of the invention, a photoresist is provided having one or more constituent components that encourage diffusion between the photoresist layer and the IML in such manner as to impart beneficial liquid-contact properties to the photoresist layer. For such an embodiment in which the IML is water, a photoresist is provided having one or more hydrophilic constituents.
Public/Granted literature
- US20050084794A1 Methods and compositions for providing photoresist with improved properties for contacting liquids Public/Granted day:2005-04-21
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