Invention Grant
US07678530B2 Lactone-containing compound, polymer, resist composition, and patterning process
有权
含内酯的化合物,聚合物,抗蚀剂组合物和图案化工艺
- Patent Title: Lactone-containing compound, polymer, resist composition, and patterning process
- Patent Title (中): 含内酯的化合物,聚合物,抗蚀剂组合物和图案化工艺
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Application No.: US11649251Application Date: 2007-01-04
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Publication No.: US07678530B2Publication Date: 2010-03-16
- Inventor: Koji Hasegawa , Satoshi Watanabe , Jun Hatakeyama , Takeshi Kinsho , Seiichiro Tachibana
- Applicant: Koji Hasegawa , Satoshi Watanabe , Jun Hatakeyama , Takeshi Kinsho , Seiichiro Tachibana
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch LLP
- Priority: JP2006-001102 20060106
- Main IPC: G03F7/038
- IPC: G03F7/038 ; G03F7/039 ; G03F7/20 ; G03F7/30

Abstract:
Lactone-containing compounds having formula (1) are novel wherein A1 is a polymerizable functional group having a double bond, R1 is a monovalent C1-C10 hydrocarbon group in which some or all hydrogen atoms are substituted by fluorine atoms, and W is CH2, O or S. They are useful as monomers to produce polymers for the formulation of radiation-sensitive resist compositions which have high transparency to radiation of up to 500 nm and exhibit good development properties. Radiation-sensitive resist compositions comprising the polymers as base resin exhibit high resolution and prevent dissolution in water and penetration of water when processed by immersion lithography.
Public/Granted literature
- US20070160929A1 Lactone-containing compound, polymer, resist composition, and patterning process Public/Granted day:2007-07-12
Information query
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