Invention Grant
- Patent Title: Method of producing a transistor
- Patent Title (中): 晶体管的制造方法
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Application No.: US12030672Application Date: 2008-02-13
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Publication No.: US07678635B2Publication Date: 2010-03-16
- Inventor: Laurent Clavelier , Frederic Mayer , Maud Vinet , Simon Deleonibus
- Applicant: Laurent Clavelier , Frederic Mayer , Maud Vinet , Simon Deleonibus
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0753288 20070215
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/8234

Abstract:
Method of producing a transistor, comprising in particular the steps of: producing a first etching mask on a gate layer, one edge of the first mask forming a pattern of the first edge of a gate of the transistor, etching the gate layer according to the first etching mask, first ion implantation in a part of the substrate not covered by the gate layer, trimming the first etching mask over a length equal to a gate length of the transistor, producing a second etching mask on the gate layer, removing the first etching mask etching the gate layer according to the second etching mask, second ion implantation in another part of the substrate.
Public/Granted literature
- US20080200001A1 METHOD OF PRODUCING A TRANSISTOR Public/Granted day:2008-08-21
Information query
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