Invention Grant
- Patent Title: Inductor formed in an integrated circuit
- Patent Title (中): 集成电路中形成的电感器
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Application No.: US12340813Application Date: 2008-12-22
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Publication No.: US07678639B2Publication Date: 2010-03-16
- Inventor: Edward Belden Harris , Sailesh Mansinh Merchant , Kurt George Steiner , Susan Clay Vitkavage
- Applicant: Edward Belden Harris , Sailesh Mansinh Merchant , Kurt George Steiner , Susan Clay Vitkavage
- Applicant Address: US PA Allentown
- Assignee: Agere Systems Inc.
- Current Assignee: Agere Systems Inc.
- Current Assignee Address: US PA Allentown
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
An inductor formed within an integrated circuit and a method for forming the inductor. The inductor comprises an underlying layer of aluminum formed in a first metallization layer and patterned and etched into the desired shape. In one embodiment the aluminum line comprises a spiral shape. According to a damascene process, a conductive runner, preferably of copper, is formed in a dielectric layer overlying the aluminum line and in electrical contact therewith. The aluminum line and the conductive runner cooperate to form the inductor. In another embodiment the aluminum line and the conductive runner are formed in a vertically spaced-apart orientation, with tungsten plugs or conductive vias formed to provide electrical connection therebetween. A method for forming the inductor comprises forming an aluminum conductive line and forming a conductive runner over the conductive line.
Public/Granted literature
- US20090100668A1 INDUCTOR FORMED IN AN INTEGRATED CIRCUIT Public/Granted day:2009-04-23
Information query
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