Invention Grant
- Patent Title: Structure and method for improved SRAM interconnect
- Patent Title (中): 用于改进SRAM互连的结构和方法
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Application No.: US12018440Application Date: 2008-01-23
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Publication No.: US07678658B2Publication Date: 2010-03-16
- Inventor: Haining Yang , Robert C. Wong
- Applicant: Haining Yang , Robert C. Wong
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent H. Daniel Schnurmann; Rosa S. Yaqhmour
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A method of forming an improved static random access memory (SRAM) interconnect structure is provided. The method includes forming a sidewall spacer around a periphery of a patterned poly-silicon layer formed over a silicon layer of a semiconductor substrate; removing the patterned poly-silicon layer for exposing a portion of a cap layer; etching the exposed portion of the cap layer for revealing a portion of the silicon layer; etching the portion of the silicon layer, in which a portion of said silicon layer connects at least a portion of pull-down device of said SRAM to at least a portion of pull-up device of said SRAM; forming a gate oxide; and forming a gate conductor over the gate oxide. An interconnect structure is also provided.
Public/Granted literature
- US20090186476A1 STRUCTURE AND METHOD FOR IMPROVED SRAM INTERCONNECT Public/Granted day:2009-07-23
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