Invention Grant
- Patent Title: Method of bonding MEMS integrated circuits
- Patent Title (中): MEMS集成电路的结合方法
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Application No.: US11766052Application Date: 2007-06-20
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Publication No.: US07678667B2Publication Date: 2010-03-16
- Inventor: Roger Mervyn Lloyd Foote , Kia Silverbrook
- Applicant: Roger Mervyn Lloyd Foote , Kia Silverbrook
- Applicant Address: AU Balmain, New South Wales
- Assignee: Silverbrook Research Pty Ltd
- Current Assignee: Silverbrook Research Pty Ltd
- Current Assignee Address: AU Balmain, New South Wales
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/46

Abstract:
A method of bonding an integrated circuit to a substrate is provided. The integrated circuit is one of a plurality of integrated circuits, each having a respective frontside releasably attached to a film frame tape supported by a wafer film frame. The method comprises the steps of: (a) positioning a substrate at a backside of the integrated circuit; (c) positioning a bonding tool on a zone of the film frame tape, the zone being aligned with the integrated circuit; and (c) applying a bonding force from the bonding tool, through the film frame tape and the integrated circuit, onto the substrate.
Public/Granted literature
- US20080318352A1 METHOD OF BONDING MEMS INTEGRATED CIRCUITS Public/Granted day:2008-12-25
Information query
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