- Patent Title: Carbon nanotube fabrication from crystallography oriented catalyst
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Application No.: US11653310Application Date: 2007-01-16
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Publication No.: US07678672B2Publication Date: 2010-03-16
- Inventor: Vincent Gambin , Roger Su-Tsung Tsai
- Applicant: Vincent Gambin , Roger Su-Tsung Tsai
- Applicant Address: US CA Los Angeles
- Assignee: Northrop Grumman Space & Mission Systems Corp.
- Current Assignee: Northrop Grumman Space & Mission Systems Corp.
- Current Assignee Address: US CA Los Angeles
- Agency: Posz Law Group, PLC
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A device and method associated with carbon nanowires, such as single walled carbon nanowires having a high degree of alignment are set forth herein. A catalyst layer is deposited having a predetermined crystallographic configuration so as to control a growth parameter, such as an alignment direction, a diameter, a crystallinity and the like of the carbon nanowire. The catalyst layer is etched to expose a sidewall portion. The carbon nanowire is nucleated from the exposed sidewall portion. An electrical circuit device can include a single crystal substrate, such as Silicon, and a crystallographically oriented catalyst layer on the substrate having an exposed sidewall portion. In the device, carbon nanowires are disposed on the single crystal substrate aligned in a direction associated with the crystallographic properties of the catalyst layer.
Public/Granted literature
- US20100029063A1 CARBON NANOTUBE FABRICATION FROM CRYSTALLOGRAPHY ORIENTED CATALYST Public/Granted day:2010-02-04
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