Invention Grant
US07678858B2 Fluorine-containing elastomer composition excellent in plasma-aging prevention effect and shaped article made thereof
有权
等离子体防老化效果优异的含氟弹性体组合物及其制成的成型制品
- Patent Title: Fluorine-containing elastomer composition excellent in plasma-aging prevention effect and shaped article made thereof
- Patent Title (中): 等离子体防老化效果优异的含氟弹性体组合物及其制成的成型制品
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Application No.: US10553976Application Date: 2004-04-21
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Publication No.: US07678858B2Publication Date: 2010-03-16
- Inventor: Hiroyuki Tanaka , Kouji Fukuyama , Tsuyoshi Noguchi
- Applicant: Hiroyuki Tanaka , Kouji Fukuyama , Tsuyoshi Noguchi
- Applicant Address: JP Osaka
- Assignee: Daikin Industries, Ltd.
- Current Assignee: Daikin Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Sughrue Mion, PLLC
- Priority: JP2003-117520 20030422; JP2003-381323 20031111
- International Application: PCT/JP2004/005688 WO 20040421
- International Announcement: WO2004/094527 WO 20041104
- Main IPC: C08L27/12
- IPC: C08L27/12
Abstract:
The present invention provides a fluorine containing elastomer composition which does not affect heat resistance and processability, is little in weight change for both of fluorine plasma and oxygen plasma exposed at the production step of a semiconductor and can inhibit generation of foreign objects (particles) significantly in those steps, and a molded article comprising the composition. The present invention relates to a fluorine containing elastomer composition for the seal material of a semiconductor production device comprising a fluorine containing elastomer and a compound having plasma antiaging effects.
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