Invention Grant
US07679029B2 Systems and methods to shape laser light as a line beam for interaction with a substrate having surface variations 有权
将激光成形为用于与具有表面变化的衬底相互作用的线束的系统和方法

  • Patent Title: Systems and methods to shape laser light as a line beam for interaction with a substrate having surface variations
  • Patent Title (中): 将激光成形为用于与具有表面变化的衬底相互作用的线束的系统和方法
  • Application No.: US11261846
    Application Date: 2005-10-28
  • Publication No.: US07679029B2
    Publication Date: 2010-03-16
  • Inventor: David S. Knowles
  • Applicant: David S. Knowles
  • Applicant Address: US CA San Diego
  • Assignee: Cymer, Inc.
  • Current Assignee: Cymer, Inc.
  • Current Assignee Address: US CA San Diego
  • Agent Matthew K. Hillman
  • Main IPC: B23K26/04
  • IPC: B23K26/04 B23K26/06 B23K26/073
Systems and methods to shape laser light as a line beam for interaction with a substrate having surface variations
Abstract:
Systems and methods are disclosed for shaping laser light as a line beam for interaction with a film that may have an imperfect, non-planar surface. The system may include a beam stop that defines an edge; a sensor that measures a distance between a selected point on a surface of the film and a reference plane and generates a signal representative of the measured distance; and an actuator coupled to the beam stop and responsive to the signal to move a portion of beam stop edge. Movement of the beam stop edge portion shifts a corresponding portion of the focused line beam in a direction normal to the reference plane to produce a line beam that more closely conforms to the surface profile of the film.
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