Invention Grant
US07679071B2 Electron beam drawing apparatus 失效
电子束描绘装置

  • Patent Title: Electron beam drawing apparatus
  • Patent Title (中): 电子束描绘装置
  • Application No.: US11630362
    Application Date: 2005-06-21
  • Publication No.: US07679071B2
    Publication Date: 2010-03-16
  • Inventor: Hiroaki Kitahara
  • Applicant: Hiroaki Kitahara
  • Applicant Address: JP Tokyo
  • Assignee: Pioneer Corporation
  • Current Assignee: Pioneer Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Nixon & Vanderhye, PC
  • Priority: JP2004-182290 20040621
  • International Application: PCT/JP2005/011346 WO 20050621
  • International Announcement: WO2005/124467 WO 20051229
  • Main IPC: G21K5/04
  • IPC: G21K5/04
Electron beam drawing apparatus
Abstract:
An example electron beam drawing apparatus includes an electron beam emitting unit which emits an electron beam, a rotary stage which rotatably supports a turntable for retaining a drawing object, and a sample stage which is supported by the turntable in a range including a rotating center of the turntable to retain an adjustment sample. A rotationally symmetrical pattern such as a concentric pattern and a radial pattern can be drawn in the drawing object by irradiating the drawing object with the electron beam during rotation of the turntable. Before the pattern is actually drawn in the drawing object, beam adjustment and rotating center adjustment are performed using an adjustment sample. The adjustment sample is retained by the sample stage, and the sample stage is supported by the turntable in the range including the rotating center of the turntable. Therefore, the beam adjustment and the rotating center adjustment can be performed using the adjustment sample supported by the turntable, and the different stage for placing the adjustment sample is not required, which allows the apparatus to be miniaturized.
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