Invention Grant
US07679261B2 Electrostatic actuator, device comprising such actuators, microsystem comprising such a device and method for making such an actuator
失效
静电致动器，包括这种致动器的装置，包括这种装置的微系统和用于制造这种致动器的方法
- Patent Title: Electrostatic actuator, device comprising such actuators, microsystem comprising such a device and method for making such an actuator
- Patent Title (中): 静电致动器，包括这种致动器的装置，包括这种装置的微系统和用于制造这种致动器的方法
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Application No.: US11472377Application Date: 2006-06-22
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Publication No.: US07679261B2Publication Date: 2010-03-16
- Inventor: Cedrick Chappaz , Claire Divoux
- Applicant: Cedrick Chappaz , Claire Divoux
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0551733 20050623
- Main IPC: H01L41/08
- IPC: H01L41/08
Abstract:
An electrostatic actuator including: at least one fixed electrode, fixed with respect to a substrate; at least one flexible electrode arranged to face the substrate; a pivot member extending from the flexible electrode, the pivot member being fixed to a face of the flexible electrode facing the fixed electrode, and the pivot member being made from a conducting material; and at least one suspending unit suspending the flexible electrode and holding the flexible electrode at rest at a distance from the substrate, wherein the suspending unit and the pivot member are different.
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