Invention Grant
US07679274B2 Monolithic piezo actuator with a change in the electrode structure in the junction region, and use of the piezo actuator
有权
单片压电致动器在接合区域中具有电极结构的变化,并使用压电致动器
- Patent Title: Monolithic piezo actuator with a change in the electrode structure in the junction region, and use of the piezo actuator
- Patent Title (中): 单片压电致动器在接合区域中具有电极结构的变化,并使用压电致动器
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Application No.: US11996601Application Date: 2006-07-26
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Publication No.: US07679274B2Publication Date: 2010-03-16
- Inventor: Harald Johannes Kastl , Carsten Schuh
- Applicant: Harald Johannes Kastl , Carsten Schuh
- Applicant Address: DE Munich
- Assignee: Siemens Aktiengesellschaft
- Current Assignee: Siemens Aktiengesellschaft
- Current Assignee Address: DE Munich
- Agency: King & Spalding L.L.P.
- Priority: DE102005034814 20050726
- International Application: PCT/EP2006/007406 WO 20060726
- International Announcement: WO2007/012485 WO 20070201
- Main IPC: H01L41/083
- IPC: H01L41/083 ; H01L41/047

Abstract:
A piezo actuator in a monolithic multilayer design, has at least one piezoelectrically active stack element, wherein the stack element has stacked piezoceramic layers made of piezoceramic material and electrode layers arranged between the piezoceramic layers, at least one piezoelectrically inactive terminating region arranged above the stack element, and at least one junction region arranged between the stack element and the terminating region, wherein the stack element, the terminating region and the junction region are connected to one another to form a monolithic total stack. The junction region has stacked piezoceramic layers and electrode layers arranged between the piezoceramic layers, and the piezoceramic layers and the electrode layers are in a form and are arranged on one another such that in the stack direction of the junction region one piezoelectrically active area per junction piezoceramic layer is successively changed from piezoceramic layer to piezoceramic layer.
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