- Patent Title: Methods and systems for semiconductor testing using reference dice
-
Application No.: US12346087Application Date: 2008-12-30
-
Publication No.: US07679392B2Publication Date: 2010-03-16
- Inventor: Gil Balog
- Applicant: Gil Balog
- Applicant Address: IL Nes-Zionna
- Assignee: OptimalTest Ltd.
- Current Assignee: OptimalTest Ltd.
- Current Assignee Address: IL Nes-Zionna
- Agency: Occhiuti Rohlicek & Tsao LLP
- Main IPC: G01R31/26
- IPC: G01R31/26

Abstract:
Methods and systems of semiconductor testing where reference dice and non-reference dice in a wafer and/or lot are tested differently. In one embodiment of the invention, geography, lithography exposure, other characteristics, performance and/or behavior are taken into account when selecting reference dice, thereby improving the likelihood that the response of reference dice to testing is well representative of the wafer and/or lot. In one embodiment, based on data from the testing of reference dice, the test flow for non-reference dice and/or other testing may or may not be adjusted.
Public/Granted literature
- US20090112501A1 METHODS AND SYSTEMS FOR SEMICONDUCTOR TESTING USING REFERENCE DICE Public/Granted day:2009-04-30
Information query