It is possible to generate D/A conversion voltage in which an error generated by numeric irregularities of a D/A conversion element such as resistor constituting a D/A converter 11 is corrected. A waveform generation method characterized in that input data into a D/A converter 11 are provided to the D/A converter in order at a timing at which a voltage of a desired waveform which has D/A conversion data indicating a conversion amount of the input data obtained by varying the input data by a minimum conversion unit or a unit obtained by multiplying the minimum conversion unit by an integer, and which varies with time series, becomes substantially equal to a D/A-converted voltage, whereby the D/A-converted voltage is generated in accordance with the desired waveform.