Invention Grant
- Patent Title: Catoptric objectives and systems using catoptric objectives
- Patent Title (中): 使用反射目标的目标和系统
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Application No.: US11317851Application Date: 2005-12-22
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Publication No.: US07682031B2Publication Date: 2010-03-23
- Inventor: Hans-Jurgen Mann , David Shafer , Wilhelm Ulrich
- Applicant: Hans-Jurgen Mann , David Shafer , Wilhelm Ulrich
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102004063313 20041223; DE102005042005 20050905
- Main IPC: G02B5/10
- IPC: G02B5/10
Abstract:
In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.
Public/Granted literature
- US20060232867A1 Catoptric objectives and systems using catoptric objectives Public/Granted day:2006-10-19
Information query
