Invention Grant
- Patent Title: PBN container and method for producing PBN container
- Patent Title (中): PBN容器和生产PBN容器的方法
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Application No.: US11239388Application Date: 2005-09-30
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Publication No.: US07682451B2Publication Date: 2010-03-23
- Inventor: Noboru Kimura , Takuma Kushihashi
- Applicant: Noboru Kimura , Takuma Kushihashi
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2004-296012 20041008
- Main IPC: C30B35/00
- IPC: C30B35/00

Abstract:
There is disclosed a PBN container in which a conductive film is deposited on a surface of a body formed by depositing PBN (pyrolytic boron nitride), wherein, at least, an angle between a PBN cut face of the body and at least one wall surface adjacent to the PBN cut face is 20°-80°, and a method for producing a PBN (pyrolytic boron nitride) container comprising at least steps of depositing PBN to form a body, processing a PBN cut face of the formed body so that at least, an angle between the PBN cut face and at least one wall surface adjacent to the PBN cut face is 20°-80°, and coating a surface of the processed body with a conductive film. Thus, there can be provided a PBN container excellent in durability where a conductive film is laminated on a surface of a body formed by depositing PBN, and a method for producing the PBN container.
Public/Granted literature
- US20070231235A1 PBN container and method for producing PBN container Public/Granted day:2007-10-04
Information query
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